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Vacuum Systems - NEVF147

Title:	Vakuové systémy
Guaranteed by:	Department of Surface and Plasma Science (32-KFPP)
Faculty:	Faculty of Mathematics and Physics
Actual:	from 2022
Semester:	summer
E-Credits:	5
Hours per week, examination:	summer s.:2/1, C+Ex [HT]
Capacity:	unlimited
Min. number of students:	unlimited
4EU+:	no
Virtual mobility / capacity:	no
State of the course:	cancelled
Language:	Czech
Teaching methods:	full-time
Teaching methods:	full-time

Guarantor:	doc. RNDr. Jiří Pavluch, CSc. RNDr. Martin Jeřáb, Ph.D.

Opinion survey results Examination dates Schedule Noticeboard

Annotation -

Last update: T_KEVF (23.05.2007)

The lectures on vacuum systems make the students acquainted with the operation and behaviour of the most common types of both high- and ultrahigh vacuum systems. With a focus on understanding and with the aim to bridge the gap in knowledge between designers and end users of vacuum equipment, vacuum system design is treated and a review of vacuum system components is given.

Literature - Czech

Last update: T_KEVF (18.05.2007)

Pátý L.: Fyzika nízkých tlaků, Academia Praha 1968.

Groszkowski J.: Technika vysokého vakua, SNTL Praha 1981.

Rozanov L.N.: Vacuum Technique, Taylor and Francis 2002.

O'Hanlon J.F.: A User's Guide to Vacuum Technology, John Wiley & Sons 2003.

Syllabus -

Last update: T_KEVF (16.05.2005)

1. Volume processes
Declination of real gas behaviour from kinetic theory of ideal gas, condensation, temperature dependence of specific heats, Joule-Thompson's effect, temperature dependence of viscosity, thermal conductivity and diffusion coefficients, Sutherland's equation, temperature dependence of mean free path, Van-der-Valse's equation of state. Mixture of gases, partial pressure, volume. mass and molar concentrations, velocity distribution. Dalton's law, general equation of state, molecular mass of gas mixture. Mean free path in gas mixture, absorption of particle beam in gas. Gas flow at low pressures, viscous and molecular flow, Clausing's coefficient computation of vacuum conductance by Monte Carlo method. Pressure distribution along a pipe, pressure differences in vacuum systems, effective pumping speed.

2. Surface processes
Phenomenological theory of adsorption, concentration of adsorbed molecules, adsorption probability, average residence time. Dynamics of sorption processes, adsorption and desorption flux, period of equilibrium attaining, period for monolayer forming,. Adsorption isotherm, kinetic derivation, Henry's, Langmuir's and BET isotherm. Adsorption site, energy distribution of adsorption sites, Freundlich and Temkin isotherm. Solution and diffusion of gases in solids, outgassing. Solution of Fick's equation for planparalel layer and bulk. Permeation.

3. Theory of evacuation
Gas quantity conservation, sources of gas in vacuum systems, transient processes. Pressure decrease during exhaust, effect of gas sources on composition of residual atmosphere, net desorption flux, conservative estimate for system with mutable gas sources. Time pressure equation including sorption, solution for weak adsorption, general solution for sorption governed by Henry's law, infimum of pressure decrease. Ultimate pressure of vacuum systems, limitation of ultimate pressure by desorption flux from surface, outgassing of vacuum systems, limitation of ultimate pressure by gas release from bulk, outgassing of construction materials.

4. Vacuum systems
Overview of pumps. Major types of vacuum systems, characterising, building and operation. Diffusion pump and turbomolecular pump systems. UHV systéme.