Subjects

Your browser does not support JavaScript, or its support is disabled. Some features may not be available.

Diagnostics methods of low-temperature plasma - NBCM140

Title:	Diagnostika nízkoteplotního plazmatu
Guaranteed by:	Department of Macromolecular Physics (32-KMF)
Faculty:	Faculty of Mathematics and Physics
Actual:	from 2010
Semester:	summer
E-Credits:	3
Hours per week, examination:	summer s.:2/0, C [HT]
Capacity:	unlimited
Min. number of students:	unlimited
4EU+:	no
Virtual mobility / capacity:	no
State of the course:	taught
Language:	Czech
Teaching methods:	full-time
Teaching methods:	full-time

Guarantor:	doc. RNDr. Ondřej Kylián, Ph.D.

Opinion survey results Examination dates SS schedule Noticeboard

Annotation -

Last update: T_KMF (18.05.2010)

In the course of this seminar is going to be given on concrete examples an overview of diagnostics methods used for the evaluation of fundamental characteristics of discharges during deposition and modification of surfaces.

Aim of the course -

Last update: T_KMF (18.05.2010)

The main aim of this lecture is to give students an overview of plasma diagnostics methods describing not only their advantages, but also their drawbacks and limitations.

Course completion requirements -

Last update: doc. RNDr. Ondřej Kylián, Ph.D. (11.06.2019)

Credit is awarded for systematic participation in the seminar and for writing a paper on one of the selected diagnostic methods. The nature of course control excludes corrective deadlines.

Literature -

Last update: doc. RNDr. Ondřej Kylián, Ph.D. (10.05.2019)

J. M. Hollas: Modern spectroscopy, J. Wiley, 2004

E.de Hoffmann, V. Stroobant: Mass Spectrometry. Principles and Applications, Wiley-Interscience, 2007

Syllabus -

Last update: T_KMF (18.05.2010)

Students will get basic of probe, optical and corpuscular plasma diagnostics methods with an emphasis given mainly to the evaluation of the fundamental characteristics of discharges during a deposition of modification of surfaces. The topic covered are:

1) Determination of densities of charged particles by mass spectrometry and probe methods

2) Determination of densities of neutral species by optical and corpuscular diagnostics methods

3) Evaluation of energetic distributions of charged particles

Determination of temperature of neutral species in the processing plasma.