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Course, academic year 2019/2020
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Physics of Thin Films I - NEVF114
Title in English: Fyzika tenkých vrstev I
Guaranteed by: Department of Surface and Plasma Science (32-KFPP)
Faculty: Faculty of Mathematics and Physics
Actual: from 2017 to 2019
Semester: winter
E-Credits: 3
Hours per week, examination: winter s.:2/0 Ex [hours/week]
Capacity: unlimited
Min. number of students: unlimited
State of the course: taught
Language: Czech
Teaching methods: full-time
Guarantor: doc. RNDr. Pavel Sobotík, CSc.
doc. RNDr. Ivan Ošťádal, CSc.
Annotation -
Last update: T_KEVF (07.05.2005)
Interaction and migration of atoms on the surface. Growth types and phases of thin film growth. Steady stae theory of nucleation of thin films. Kinetics versus termodynamics. Rate equations of thin film growth. Critical island diameter for growth of the next layer. 2D-3D transition. Computer simulations of thin film growth. Growth on atomic terraces. Epitaxial growth - Stranski-Krastanov growth. Properties of thin film structures - electrical, magnetic, optical and mechanical. Application of thin films -examples. Low-dimensional structures.
Course completion requirements - Czech
Last update: doc. RNDr. Jiří Pavlů, Ph.D. (14.06.2019)

Podmínkou zakončení předmětu je úspěšné složení zkoušky, tj. hodnocení zkoušky známkou "výborně", "velmi dobře" nebo "dobře". Zkouška musí být složena v období předepsaném harmonogramem akademického roku, ve kterém student předmět zapsal.

Literature - Czech
Last update: T_KEVF (07.05.2005)

Eckertová L.: Physics of Thin Films, Plenum Press - SNTL, New York - Praha, 1986.

Venables J. A.: Surfaces and Thin Film Processes, Cambridge Univ. Press Cambridge 2000.

Michely T., Krug. J.: Islands, Mounds and Atoms, Springer-Verlag Berlin Heidelberg 2004.

Requirements to the exam - Czech
Last update: doc. RNDr. Pavel Sobotík, CSc. (06.10.2017)

Zkouška probíhá ústní formou.

Požadavky odpovídají sylabu předmětu v rozsahu, který byl prezentován na přednášce.

Syllabus -
Last update: T_KEVF (13.05.2005)
1. Basic processes at deposition
Adsorption. Adatom movement in a surface potential- surface diffusion. Interaction of adatoms and clusters. The role of steps, defects and dopants.

2. Nucleation and thin film growth theory
Modes and phases of thin film growth. Steady state nucleation theory. Atomistic model. Kinetic equation of the growth. Thin film growth simulations. Kinetic versus thermodynamic.

3. Influence of parameters on the thin film growth
Amorphous, polycrystallic a epitaxial films. The role of the stress - Stranski-Krastanov growth. The role of the kinetic (2Dx3D growth, critical island radius, steps, Ehrlich-Schvoebel barrier, step-flow growth).

4. Properties of thin films
Electrical, mechanical, magnetic and optical properties. Thin film applications.

5. Nanostructures
Properties of low-dimensional systems. Preparation of nanostructures. Selforganized growth of nanostructures.

 
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