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Course, academic year 2023/2024
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Vacuum Technology - NEVF105
Title: Vakuová technika
Guaranteed by: Department of Surface and Plasma Science (32-KFPP)
Faculty: Faculty of Mathematics and Physics
Actual: from 2020
Semester: summer
E-Credits: 5
Hours per week, examination: summer s.:2/1, C+Ex [HT]
Capacity: unlimited
Min. number of students: unlimited
4EU+: no
Virtual mobility / capacity: no
State of the course: taught
Language: Czech, English
Teaching methods: full-time
Teaching methods: full-time
Additional information: https://physics.mff.cuni.cz/kfpp/rozvrh.html
Guarantor: RNDr. Tomáš Gronych, CSc.
doc. RNDr. Jiří Pavlů, Ph.D.
Annotation -
Brief information about application of vacuum technology to physical experiments and some industrial branches. Physical basis of vacuum technology. Vacuum pumps and gauges. High vacuum and ultra high vacuum systems. Leaks and leak detectors. Materials for vacuum systems. Hints on the operation of vacuum apparatus.
Last update: T_KEVF (19.03.2003)
Course completion requirements - Czech

Podmínkou zakončení předmětu je úspěšné složení zkoušky, získání zápočtu je podmínkou pro konání zkoušky.

Udělení zápočtu je podmíněno absolvováním tří praktických úloh + vypracováním protokolu u vybraných dvou.

Povaha kontroly studia předmětu vylučuje opakování této kontroly, zápočet se tedy opakovat nedá.

Last update: Pavlů Jiří, doc. RNDr., Ph.D. (29.05.2020)
Literature - Czech

Pátý L.: Fyzika nízkých tlaků, Academia Praha 1968.

Groszkowski J.: Technika vysokého vakua, SNTL Praha 1981.

Lafferty J. M.: Foundations of vacuum science and technology, John Wiley & Sons, New York 1998.

Last update: T_KEVF (05.05.2004)
Requirements to the exam - Czech

Zkouška je ústní.

Požadavky ke zkoušce odpovídají sylabu předmětu v rozsahu, který byl prezentován na přednáškách.

Last update: Gronych Tomáš, RNDr., CSc. (12.10.2017)
Syllabus -

Requirements for materials accepting in vacuum systems. Construction materials, isolators, elastomers.

Methods of treatment and coupling of vacuum materials. Cleaning and maintenance of vacuum apparatus.

Methods of low pressure production, positive displacement pumps, momentum exchange pumps and capture pumps. Mechanical pumps, rotary vane pump, Root's pump, "dry" pumps. Turbomolecular pump, drag stage. Diffusion pump, oil backstreaming, traps.

Fundamentals of cryotechnology, cryogenic pump. Cryosorption pump. Titanium sublimation pump, ion pump, non-evaporable getter pump.

Methods of low pressure measurement, total and partial pressure. Vacuum gauges fundamental properties and characteristics. Direct-reading gauges, Bourdon and diaphragm gauges, capacitance manometer. Indirect-reading gauges, Thermocouple gauge, Pirani gauge, Penning gauge, hot cathode ionisation gauge.

Partial pressure measurement. Mass spectrometers, residual gas analysers. Quadrupole, time-of-flight spectrometer.

Methods of leak detection, helium leak detector. Leak detection with indirect-reading vacuum gauges.

Components of vacuum systems. Flanges, demountable joints and seals. Valves, connecting components, motion and electric feedthroughs, windows.

Basic vacuum systems, operation, troubleshooting and maintenance.

Last update: T_KEVF (13.05.2005)
 
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