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Course, academic year 2024/2025
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Introduction to deposition and characterization of thin films - NBCM237
Title: Základy přípravy a charakterizace tenkých vrstev
Guaranteed by: Department of Macromolecular Physics (32-KMF)
Faculty: Faculty of Mathematics and Physics
Actual: from 2020
Semester: summer
E-Credits: 4
Hours per week, examination: summer s.:1/2, C+Ex [HT]
Capacity: unlimited
Min. number of students: unlimited
4EU+: no
Virtual mobility / capacity: no
State of the course: taught
Language: Czech, English
Teaching methods: full-time
Guarantor: doc. Mgr. Jan Hanuš, Ph.D.
prof. Ing. Andrey Shukurov, Ph.D.
Teacher(s): doc. Mgr. Jan Hanuš, Ph.D.
prof. Ing. Andrey Shukurov, Ph.D.
Annotation -
Students will learn about preparation methods and possible applications of thin films of polymers, metals and inorganic compounds. An overview of physical and chemical methods of preparing thin films, including methods based on low-temperature plasma, will be presented. Students will also learn about the methods of characterizing thin films, including evaluation of their thickness, chemical composition, optoelectronic and mechanical properties. The theoretical introduction to the subject will always be followed by a practical part, which will take place directly in the KMF labs.
Last update: Búryová Marcela (14.05.2024)
Literature -

[1] H. Biederman: Plasma Polymer Films. Imperial College Press, London 2004

[2] H. Biederman, Y.Osada: Plasma Polymerisation Processes. Elsevier, Amsterdam 1992

[3] M. Vůjtek, R. Kubínek, M. Mašláň: Nanoskopie, Univ. Palackého Olomouc 2012

[4] N. Fairley: CasaXPS Manual, www.casaxps.com

Last update: Búryová Marcela (14.05.2024)
Requirements to the exam -

The exam is oral. The condition for granting credit and passing the exam is systematic attendance. The exam requirements correspond to the syllabus of the subject to the extent presented at the lecture.

Last update: Búryová Marcela (14.05.2024)
Syllabus -

1) Definition of terms: polymer, metal, inorganic compound, thin film, surface

2) Mechanisms of growth of thin films

3) Methods of preparing thin films in the liquid phase: dip-coating, spin-coating, sol-gel processes, electrolytic deposition

4) Introduction to the vacuum and plasma deposition of thin films: evaporation, magnetron sputtering, reactive magnetron sputtering, plasma polymerization

5) Measurement of optical properties and thickness of thin films: spectroscopic ellipsometry, UV-vis spectrophotometry

6) Methods of analysis of the chemical composition of thin films: XPS, FTIR, EDX

7) Examination of surface morphology: AFM, SEM, profilometry

8) Methods for determining wettability, mechanical and bioadhesive properties of thin films

Last update: Búryová Marcela (14.05.2024)
 
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