Subjects

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Construction of Deposition Apparatuses - NBCM234

Title:	Konstrukce depozičních aparatur
Form of teaching:	lecture+practicals
Guaranteed by:	Department of Macromolecular Physics (32-KMF)
Faculty:	Faculty of Mathematics and Physics
Actual:	from 2019
Duration in semesters:	1
Semester:	winter
E-Credits:	5
Hours per week, examination:	winter s.:2/1, C+Ex [HT]
Capacity:	unlimited
Maximum number of enrolled students:	unlimited
Min. number of students:	unlimited
4EU+:	no
Virtual mobility / capacity:	no
State of the course:	taught
Language:	Czech
Teaching methods:	full-time
Repeated enrollment:	2 / 2 / 2 / 2

Guarantor:	doc. Mgr. Jan Hanuš, Ph.D.
Teacher(s):	doc. Mgr. Jan Hanuš, Ph.D.

Annotation -

Vacuum technique and its application for construction of deposition apparatuses.

Last update: Búryová Marcela (14.05.2019)

Course completion requirements - Czech

Zápočet je udělen za účast a prokázaní získaných teoretických znalostí v praxi. Vzhledem k nutné účasti na cvičeních není možno zápočet opakovat.

Last update: Hanuš Jan, doc. Mgr., Ph.D. (06.10.2017)

Literature - Czech

(1) John F. O'Hanlon, A User's Guide to Vacuum Technology, John Wiley & Sons, 2005

(2) Libor Pátý, Jiří Petr, Vakuová technika, České vysoké učení technické, Praha, 1990

Last update: Hanuš Jan, doc. Mgr., Ph.D. (13.05.2019)

Course assessment methods and requirements for successful completion, grading scheme -

Oral examination; the requirements correspond to the course syllabus within the scope covered during the lectures.

Last update: Hanuš Jan, doc. Mgr., Ph.D. (14.05.2026)

Syllabus -

Basic types of deposition setups.

Construction elements and materials for vacuum apparatus.

Pumping Systems - Types of primary and secondary pumps.

Pressure measurement, gauges for HV and UHV.

Management of working gases and liquids.

Apparatus for atmospheric pressure deposition.

Design and construction of deposition apparatus.

Last update: Hanuš Jan, doc. Mgr., Ph.D. (14.05.2019)