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Analysis Methods of Surfaces and Thin Layers - NBCM233

Title:	Metody analýzy povrchů a tenkých vrstev
Form of teaching:	lecture+practicals
Guaranteed by:	Department of Macromolecular Physics (32-KMF)
Faculty:	Faculty of Mathematics and Physics
Actual:	from 2022
Duration in semesters:	1
Semester:	winter
E-Credits:	5
Hours per week, examination:	winter s.:2/1, C+Ex [HT]
Capacity:	unlimited
Maximum number of enrolled students:	unlimited
Min. number of students:	unlimited
4EU+:	no
Virtual mobility / capacity:	no
State of the course:	taught
Language:	Czech, English
Teaching methods:	full-time
Repeated enrollment:	2 / 2 / 2 / 2

Guarantor:	prof. Ing. Andrey Shukurov, Ph.D. doc. Mgr. Jan Hanuš, Ph.D. doc. Mgr. Jaroslav Kousal, Ph.D.
Teacher(s):	doc. Mgr. Jan Hanuš, Ph.D. doc. Mgr. Jaroslav Kousal, Ph.D. Mgr. Daniil Nikitin, Ph.D.

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Annotation -

Elelments of scanning probe microscopy. Resolution. Contact, semi-contact and non-contact measurement regimes. Advanced regimes of measuremen. AFM spectroscopy. Statistical analysis of surfaces.. X-ray photoelectron spectroscopy, method sources. Qualitative and quantitative analysis. Surface sensitivity. Auger electrons. Chemical shift.. Limitations of the method. Data evaluation. Surfaces and thin films vs. radiation in optical range. Significance of individual spectral ranges. Absorption and interference methd. Fourier spectroscopy. Reflection of polarized light, ellipsometry.

Last update: T_KFES (14.05.2015)

Course completion requirements -

The lecture and laboratory training will be conducted in presence. Credit is awarded for systematic attendance at lectures and demonstration of the acquired theoretical knowledge in practice. The final exam will also be held in person.

Last update: Shukurov Andrey, prof. Ing., Ph.D. (01.09.2025)

Literature -

V. L. Mironov, Fundamentals of Scanning Probe Microscopy, The textbook for students of the senior courses of higher educational institutions, 2004, p. 97.

D. Briggs, Surface analysis of polymers by XPS and static SIMS, 1998, p. 198.

Last update: Shukurov Andrey, prof. Ing., Ph.D. (01.09.2025)

Course assessment methods and requirements for successful completion, grading scheme -

The exam is oral and will take place in person. The requirements for the exam correspond to the syllabus of the course to the extent that was presented in the lecture.

Last update: Shukurov Andrey, prof. Ing., Ph.D. (01.09.2025)

Syllabus -

Basics of scanning probe microscopy. Force interaction between tip and surface. Resolution and measurement artifacts. Contact, semi-contact and non-contact measurement modes. Advanced measurement modes (local electrical, viscoelastic and tribological properties). AFM spectroscopy. Statistical analysis of surfaces. X-ray photoelectron spectroscopy. Principle of the method, sources of X-rays, electron analyzer. Qualitative and quantitative analysis. Surface sensitivity. Auger electrons. Chemical shift. Method limitations. Data processing methods, CASA XPS analysis. Surfaces and thin films vs. radiation in the optical field. The importance of individual spectral fields. Absorption and interference methods. Fourier spectroscopy. Reflection of polarized light, principle of ellipsometry. Accuracy and sensitivity of ellipsometry, constraints. Ellipsometric analysis of optically non-trivial structures.

Last update: Shukurov Andrey, prof. Ing., Ph.D. (01.09.2025)