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In the course of this seminar is going to be given on concrete examples an overview of diagnostics methods used for the
evaluation of fundamental characteristics of discharges during deposition and modification of surfaces.
Last update: T_KMF (18.05.2010)
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The main aim of this lecture is to give students an overview of plasma diagnostics methods describing not only their advantages, but also their drawbacks and limitations. Last update: T_KMF (18.05.2010)
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Credit is awarded for systematic participation in the seminar and for writing a paper on one of the selected diagnostic methods. The nature of course control excludes corrective deadlines. Last update: Kylián Ondřej, doc. RNDr., Ph.D. (11.06.2019)
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J. M. Hollas: Modern spectroscopy, J. Wiley, 2004 E.de Hoffmann, V. Stroobant: Mass Spectrometry. Principles and Applications, Wiley-Interscience, 2007 Last update: Kylián Ondřej, doc. RNDr., Ph.D. (10.05.2019)
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Students will get basic of probe, optical and corpuscular plasma diagnostics methods with an emphasis given mainly to the evaluation of the fundamental characteristics of discharges during a deposition of modification of surfaces. The topic covered are: 1) Determination of densities of charged particles by mass spectrometry and probe methods 2) Determination of densities of neutral species by optical and corpuscular diagnostics methods 3) Evaluation of energetic distributions of charged particles Determination of temperature of neutral species in the processing plasma. Last update: T_KMF (18.05.2010)
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