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Course, academic year 2018/2019
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Diagnostics methods of low-temperature plasma - NBCM140
Title in English: Diagnostika nízkoteplotního plazmatu
Guaranteed by: Department of Macromolecular Physics (32-KMF)
Faculty: Faculty of Mathematics and Physics
Actual: from 2010
Semester: summer
E-Credits: 3
Hours per week, examination: summer s.:2/0 C [hours/week]
Capacity: unlimited
Min. number of students: unlimited
State of the course: taught
Language: Czech
Teaching methods: full-time
Guarantor: doc. RNDr. Ondřej Kylián, Ph.D.
Annotation -
Last update: T_KMF (18.05.2010)
In the course of this seminar is going to be given on concrete examples an overview of diagnostics methods used for the evaluation of fundamental characteristics of discharges during deposition and modification of surfaces.
Aim of the course -
Last update: T_KMF (18.05.2010)

The main aim of this lecture is to give students an overview of plasma diagnostics methods describing not only their advantages, but also their drawbacks and limitations.

Course completion requirements - Czech
Last update: doc. RNDr. Ondřej Kylián, Ph.D. (09.10.2017)

Zápočet je udělován za systematickou účast na semináři a za vypracování referátu o jedné z vybraných diagnostických metod. Povaha kontroly studia předmětu vylučuje opravné termíny zápočtu.

Syllabus -
Last update: T_KMF (18.05.2010)

Students will get basic of probe, optical and corpuscular plasma diagnostics methods with an emphasis given mainly to the evaluation of the fundamental characteristics of discharges during a deposition of modification of surfaces. The topic covered are:

1) Determination of densities of charged particles by mass spectrometry and probe methods

2) Determination of densities of neutral species by optical and corpuscular diagnostics methods

3) Evaluation of energetic distributions of charged particles

Determination of temperature of neutral species in the processing plasma.

 
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