Depozice vrstev pomocí magnetronů a plazmového reaktoru se systémem dutých katod
Thesis title in Czech: | Depozice vrstev pomocí magnetronů a plazmového reaktoru se systémem dutých katod |
---|---|
Thesis title in English: | |
Academic year of topic announcement: | 1997/1998 |
Thesis type: | dissertation |
Thesis language: | |
Department: | Department of Surface and Plasma Science (32-KFPP) |
Supervisor: | prof. RNDr. Miloš Šícha, DrSc. |
Author: | hidden - assigned and confirmed by the Study Dept. |
Date of registration: | 01.10.1997 |
Date of assignment: | 01.10.1997 |
Date and time of defence: | 26.09.2005 11:00 |
Date of electronic submission: | 26.09.2005 |
Date of submission of printed version: | 26.09.2005 |
Date of proceeded defence: | 26.09.2005 |
Opponents: | prof. RNDr. Vratislav Kapička, DrSc. |
prof. RNDr. Hynek Biederman, DrSc. | |
doc. RNDr. Karel Rusňák, CSc. | |