A study of diagnostic systems for plasma sources designed for deposition of thin films (with an applicaton in plasma chemistry)
Thesis title in Czech: | Studium diagnostických systémů pro plazmové zdroje určené pro depozice tenkých vrstev ( s aplikací v plazmochemii) |
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Thesis title in English: | A study of diagnostic systems for plasma sources designed for deposition of thin films (with an applicaton in plasma chemistry) |
Academic year of topic announcement: | 2004/2005 |
Thesis type: | dissertation |
Thesis language: | angličtina |
Department: | Department of Surface and Plasma Science (32-KFPP) |
Supervisor: | prof. RNDr. Milan Tichý, DrSc. |
Author: | hidden - assigned and confirmed by the Study Dept. |
Date of registration: | 01.10.2004 |
Date of assignment: | 01.10.2004 |
Date and time of defence: | 11.01.2010 09:00 |
Date of electronic submission: | 11.01.2010 |
Date of proceeded defence: | 11.01.2010 |
Opponents: | RNDr. Jaroslav Pavlík, CSc. |
prof. RNDr. Hynek Biederman, DrSc. | |
Doc. Mgr. Lenka Zajíčková, Ph.D. | |